Ulrich Hilleringmann
Silicon Semiconductor Technology
Processing and Integration of Microelectronic Devices
Paperback Engels 2023 9783658410407
Verwachte levertijd ongeveer 9 werkdagen
Samenvatting
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.
Specificaties
ISBN13:9783658410407
Taal:Engels
Bindwijze:paperback
Uitgever:Springer Fachmedien Wiesbaden
Lezersrecensies
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Inhoudsopgave
<p>Wafer fabrication.- Thermal oxidation.- Lithography.- Etching technology.- Doping techniques.- Chemical and Physical Deposition.- Metallization and Contacts.</p><br><p></p>
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