Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

MEMS/NEMS Technologies and Applications.- History of Early Research on MEMS in Russia (U.S.S.R.).- Challenges of Complete CMOS/MEMS Systems Integration.- MEMS for Practical Applications.- Nanochip: A MEMS-Based Ultra-High Data Density Memory Device.- Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU.- Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors.- Monocrystalline-Silicon Microwave MEMS Devices.- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites.- MEMS Device and Reliability Physics.- Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams.- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS.- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches.- Advanced Processes and Materials.- Development of DRIE for the Next Generation of MEMS Devices.- Low-Temperature Processes for MEMS Device Fabrication.- High-Temperature Stable Au–Sn and Cu–Sn Interconnects for 3D Stacked Applications.- 3D Integration of MEMS and IC: Design, Technology and Simulations.- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices.- Modeling of Dry Etching in Production of MEMS.- XRD and Raman Study of Low Temperature AlGaAs/GaAs (100) Heterostructures.- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys.- Sensors.- Smart Sensors: Advantages and Pitfalls.- Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents.- Integration of Diverse Biological Materials in Micro/Nano Devices.- Force Sensing Optimization and Applications.- Using ParametricResonance to Improve Micro Gyrsocope Robustness.